JPH0478551U - - Google Patents
Info
- Publication number
- JPH0478551U JPH0478551U JP12154890U JP12154890U JPH0478551U JP H0478551 U JPH0478551 U JP H0478551U JP 12154890 U JP12154890 U JP 12154890U JP 12154890 U JP12154890 U JP 12154890U JP H0478551 U JPH0478551 U JP H0478551U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- thickness
- thin film
- semiconductor thin
- part electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 2
- 229910000510 noble metal Inorganic materials 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12154890U JPH0478551U (en]) | 1990-11-19 | 1990-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12154890U JPH0478551U (en]) | 1990-11-19 | 1990-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0478551U true JPH0478551U (en]) | 1992-07-08 |
Family
ID=31869399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12154890U Pending JPH0478551U (en]) | 1990-11-19 | 1990-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0478551U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58169052A (ja) * | 1982-03-31 | 1983-10-05 | Toshiba Corp | 感ガス素子 |
-
1990
- 1990-11-19 JP JP12154890U patent/JPH0478551U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58169052A (ja) * | 1982-03-31 | 1983-10-05 | Toshiba Corp | 感ガス素子 |